The LightSpeed is a state-of-the-art tool for unpatterned defect inspection, offering high flexibility for multiple applications.
- Metrology and Inspection
- Topographic Defects Inspection System
- China
- Europe
- Japan
- Korea
- SEA
- Taiwan
- HBM
- Power Semiconductor
- Sensors (MEMS, Optoelectronics)
- SOI
- UNITY-SC®